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High Accuracy MEMS Thermal Micro Gas Mass Flow Meter – RS485 & 4–20mA Output
A precision MEMS-based thermal gas mass flow meter designed for accurate low-flow gas measurement. Featuring RS485 communication and 4–20mA output, it is ideal for industrial process control, laboratory systems, and gas monitoring applications.
This MEMS thermal micro gas mass flow meter utilises advanced thermal dispersion sensing technology to provide direct mass flow measurement of gases without the need for temperature or pressure compensation under stable conditions.
The integrated MEMS sensor delivers high sensitivity and fast response, making it particularly suitable for low-flow gas applications such as compressed air monitoring, nitrogen dosing, gas blending systems, environmental control, and laboratory instrumentation.
Operating on DC 24V with low power consumption (2.5W), the meter supports both 4–20mA analog output for integration with PLC analog inputs and RS485 communication (typically Modbus RTU) for digital data transmission to SCADA, RTU, or data logging systems.
Designed for compact installation in automation panels and process lines, it provides stable measurement across a medium temperature range of −10°C to +55°C.
Typical applications include:
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Compressed air monitoring
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Industrial gas consumption measurement
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Laboratory gas flow control
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Burner and combustion monitoring
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Semiconductor and cleanroom systems
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Environmental monitoring platforms